Fabrication, structure and mechanical properties of indium nanopillars

نویسندگان

  • Gyuhyon Lee
  • Ju-Young Kim
  • Arief Suriadi Budiman
  • Nobumichi Tamura
  • Martin Kunz
  • Kai Chen
  • Michael J. Burek
  • Julia R. Greer
  • Ting Y. Tsui
چکیده

Solid and hollow cylindrical indium pillars with nanoscale diameters were prepared using electron beam lithography followed by the electroplating fabrication method. The microstructure of the solid-core indium pillars was characterized by scanning micro-X-ray diffraction, which shows that the indium pillars were annealed at room temperature with very few dislocations remaining in the samples. The mechanical properties of the solid pillars were characterized using a uniaxial microcompression technique, which demonstrated that the engineering yield stress is 9 times greater than bulk and is 1/28 of the indium shear modulus, suggesting that the attained stresses are close to theoretical strength. Microcompression of hollow indium nanopillars showed evidence of brittle fracture. This may suggest that the failure mode for one of the most ductile metals can become brittle when the feature size is sufficiently small. 2009 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

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تاریخ انتشار 2009